Ultrathin ZrO2 thickness control on TiO2/ZrO2 core/shell nanoparticles using ZrO2 atomic layer deposition and etching
Year: 2024
Type: article
DOI: 10.1116/6.0003781
Institutions: University of Colorado Boulder, University of Colorado System
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funders: Lam Research, Meta
OpenAlex ID: W4401973316