Work

Polysilicon Modulator Utilizing CMOS-Compatible Local Excimer Laser Annealing Technology

Year: 2024

Type: article

Source: Journal of Lightwave Technology

DOI: 10.1109/jlt.2024.3451963

Authors: Kunhao Lei, Lichun Wang, Bo Tang, Maoliang Wei, Kangjian Bao, Zequn Chen, Yuting Ye, Boshu Sun, Jialing Jian, Lan Li, Junying Li, Hongtao Lin

Institutions: Zhejiang University, Chinese Academy of Sciences, Institute of Microelectronics, Westlake University, University of Chinese Academy of Sciences

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Chinese Academy of Sciences, University of Chinese Academy of Sciences

Awards: G1457741855, G6176399248, G8658011977

OpenAlex ID: W4401990760

FWCI: 0.103

Cites: 28

Cited by: 1

Related to: 10