A Unified TDDB Model for BEOL Dielectrics of Various Structures and Thick FEOL Dielectrics
Year: 2024
Type: article
Authors: Kenji Okada, Kei Date, Brian McGowan, Huai Huang, Ernest Wu, Niki Fokas, Claire Silvestre, Lili Cheng, Atsunobu Isobayashi, Tatsuya Usami, Akihisa Iwasaki, Noboru Takeuchi, Hiroshi Miki, Yasuhiro Isobe, Miaomiao Wang, Craig Child
Institution: IBM (United States)
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4401991097