Work

Fault Diagnosis of Semiconductor Handlers using Multiple Autoencoders

Year: 2024

Type: article

Source: Transactions of the Korean Society for Noise and Vibration Engineering

DOI: 10.5050/ksnve.2024.34.4.393

Authors: Won-Sup Lee, Yeon-June Kang

Language: English

Topic: Machine Fault Diagnosis Techniques

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Ministry of SMEs and Startups

Award: G5887817254

OpenAlex ID: W4402020856

FWCI:

Cites: 7

Cited by:

Related to: 10