Work

Direct Monitoring of Nanoscale Deformations across All Layers in Three-Dimensional Stacked Structures

Year: 2024

Type: article

Source: ACS Photonics

DOI: 10.1021/acsphotonics.4c00784

Authors: Xiangyu Zhao, Hao Jiang, Jiamin Liu, Changqing Liu, Hui Deng, Renjie Zhou, Nicholas X. Fang, Shiyuan Liu, Jinlong Zhu

Institutions: Huazhong University of Science and Technology, Optics Valley Laboratory, Southern University of Science and Technology, Chinese University of Hong Kong, University of Hong Kong

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Shenzhen Fundamental Research Program, National Key Research and Development Program of China

Awards: G3641333820, G4660450540, G8659983331, G8966773332

OpenAlex ID: W4402031334

FWCI: 0.863

Cites: 28

Cited by: 6

Related to: 10