Work

Optical and electronic properties of Ge1−xSnx/Si alloys grown by remote plasma-enhanced chemical vapor deposition

Year: 2024

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0003759

Authors: Kevin K. Choe, Daniel Felker, Bruce Claflin, Gordon Grzybowski, Christina L. Dugan

Institutions: Wright-Patterson Air Force Base, U.S. Air Force Institute of Technology, U.S. Air Force Research Laboratory Sensors Directorate, KBR (United States)

Language: English

Topic: Advanced Semiconductor Detectors and Materials

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402045802

FWCI:

Cites: 30

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Related to: 10