Monolithic finite element modeling of compressible fluid‐structure‐electrostatics interactions in MEMS devices
Year: 2024
Type: article
DOI: 10.1002/fld.5329
Authors: Suman Dutta, C. S. Jog
Institution: Indian Institute of Science Bangalore
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4402056721
