Work

Interferometric microscale measurement of refractive index at VIS and IR wavelengths

Year: 2024

Type: article

Abstract: Determination of refractive index of micro-disks of a calcinated ( 1100^\circ 1100 ∘ C in air) photo-resist SZ2080 ^\mathrm{TM} T M was carried out using transmission and reflection spectroscopy. Interference fringes at specific wavenumbers/wavelengths were selected for determination of the optical thickness, hence, the refractive index when the thickness of micro-disks was measured by scanning electron microscopy (SEM). Refractive index of disks of \sim 6± 1~\mu ∼ 6 ± 1 μ m thickness were determined at visible and IR (2.5-13~ \mu μ m) spectral ranges and where 2.2± 0.2 2.2 ± 0.2 at visible and IR wavelengths. Peculiarities of optical characterisation of micro-optical structures are discussed in view of possible uncertainties in the definition of geometric parameters, shape and mass density redistribution.

Source: SciPost Physics Core

DOI: 10.21468/scipostphyscore.7.3.059