Combined magnetron sputtering and laser annealing process for the fabrication of proton conducting thin films
Year: 2024
Type: article
Abstract: Acceptor doped barium zirconates are known for their exceptional protonic conductivity and the challenges in their fabrication. Within this work, BaZr0.8Y0.2O3-δ (BZY20) films were successfully deposited on a BaZr0.7Ce0.2Y0.1O3-δ/Ni (BZCY72/Ni) substrate using a combination of closed-field unbalanced magnetron sputtering and various annealing techniques such as conventional furnace annealing and laser annealing. Thin films could be tempered at only 800 °C with an additional laser annealing step and exhibit a heigh density as well as a sufficient protonic conductance. The highest measured ionic conductivity was 1.11*10−3 S/cm. The provided synthesis could pave the way for employing metallic supports in protonic ceramic fuel cells by using lower sintering temperatures than normally required.
Source: Vacuum
Authors: J. Wallis, O. Ravkina, F. Käufer, R.V. Mallinckrodt, A.-E. Surkus, H. Wulff, J. Wartmann, A. Kruth
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: hybrid
Estimated APC paid: $2,990
Award: G2974541801
OpenAlex ID: W4402073367