A MEMS Thermopile With Al Decorated Nanoforests Capable of Broadband UV Detection
Year: 2024
Type: article
Source: IEEE Electron Device Letters
Authors: Yonglong Pu, Huabin Yang, Meng Shi, Qirui Zhang, Na Zhou, Chengjun Huang, Haiyang Mao
Institutions: Chinese Academy of Sciences, Institute of Microelectronics
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4402125211