Work

A Bent-TBTF Resonant MEMS Accelerometer Using Auxiliary Supporting Beams

Year: 2024

Type: article

Source: IEEE Electron Device Letters

DOI: 10.1109/led.2024.3453324

Authors: Cheng Tu, Yi-Ming Pan, Zenghui Wang, Xiao-Sheng Zhang

Institution: University of Electronic Science and Technology of China

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, National Key Research and Development Program of China, Key Research and Development Program of Sichuan Province

Awards: G2713572605, G3356786547, G442399315, G7978686256, G8358269746

OpenAlex ID: W4402130465

FWCI: 0.416

Cites: 17

Cited by: 4

Related to: 10