Work

A Chip-Scale Silicon Cavity Optomechanical Accelerometer With Extended Frequency Range

Year: 2024

Type: article

Source: IEEE Sensors Journal

DOI: 10.1109/jsen.2024.3443309

Authors: Zhe Li, Xinwei Li, Dingwei Chen, Senyu Zhang, Chengwei Xian, Pengju Kuang, Yifan Wang, Kai Chen, Gen Qiu, Guangwei Deng, Yongjun Huang

Institution: University of Electronic Science and Technology of China

Language: English

Topic: Mechanical and Optical Resonators

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G2831643067, G6729786557, G7995322002, G8779161443

OpenAlex ID: W4402156938

FWCI: 1.591

Cites: 46

Cited by: 10

Related to: 10