Work

Heterogeneous Integration of 42°YX LiNbO₃/SiO₂/Quartz for Wideband and Spurious-Free SAW Resonators

Year: 2024

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/ted.2024.3450438

Authors: Xinjian Ke, Jinbo Wu, Yang Chen, Shibin Zhang, Xiaomeng Zhao, Pengcheng Zheng, Min Zhou, Kai Huang, Xin Ou

Institutions: Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Key Research and Development Program of China

Award: G3494000558

OpenAlex ID: W4402171163

FWCI: 1.367

Cites: 36

Cited by: 13

Related to: 10