A unified global model accompanied with a voltage and current sensor for low-pressure capacitively coupled RF discharge
Year: 2024
Type: article
Abstract: A global model (GM) assumes ion energy ( ε ) on the electrode equals the time-averaged sheath voltage ( V sh t t ). However, using particle-in-cell simulation, we found that ε differs from V sh t t . We propose a unified global model (UGM) that calculates ε and collisional energy losses of ions by employing plasma circuit and sheath models, accompanied by a voltage and current sensor. We compared the results of the UGM with the experimental measurements and the results revealed that UGM is closer to the experiment than GM. UGM shows a linear relationship with the experiment, indicating that the UGM is applicable for plasma monitoring.
Source: Applied Physics Express
Institutions: Chungnam National University, SK Hynix (South Korea)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,250
Awards: G4979257535, G75951965
OpenAlex ID: W4402172338