Work

Simulating temporal speckle with prescribed correlation properties in optical lithography

Year: 2024

Type: article

Source: Journal of the Optical Society of America A

DOI: 10.1364/josaa.530912

Authors: Tomohiro Shirai, Masaki Arakawa, Yousuke Fujimaki, Takahito Kumazaki, Kouji Kakizaki

Institution: Gigaphoton Inc (Japan)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Japan Society for the Promotion of Science

Award: High-resolution optical imaging through scattering media by means of quantum mimetics and wavefront shaping

OpenAlex ID: W4402190447

FWCI: 0.103

Cites: 23

Cited by: 1

Related to: 10