Polarity of homoepitaxial ZnO films grown by Nd:YAG pulsed laser deposition
Year: 2024
Type: article
Abstract: We investigate the stability of the polar surface of ZnO films grown homoepitaxially on atomically flat ZnO (0001¯) O-face substrates by neodymium yttrium aluminum garnet (Nd:YAG) pulsed laser deposition (PLD). For films grown in the temperature range from 500 to 700 °C, ion scattering spectroscopy showed that the film surface termination was the same as the ZnO substrate. Even for a Mg0.2Zn0.8O/ZnO superlattice, no polarity reversal occurred, indicating that the ZnO (0001¯) O-face is highly stable, despite the film surface sputtering caused by the high kinetic energy of the PLD plume generated by the Nd:YAG laser.
Source: Journal of Applied Physics
DOI: 10.1063/5.0223495
Authors: Tatsuya Masuda, Toshihiro Sato, Mikk Lippmaa, Takuro Dazai, Norihiko Sekine, Iwao Hosako, Hideomi Koinuma, Ryota Takahashi
Language: English
Topic: ZnO doping and properties
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: hybrid
Estimated APC paid: $3,500
Funder: JST-Mirai Program
Award: G8638384116
OpenAlex ID: W4402194262