Work

OrbiSIMS depth profiling of semiconductor materials—Useful yield and depth resolution

Year: 2024

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0003821

Authors: Yundong Zhou, Alexis Franquet, Valentina Spampinato, Alex Merkulov, Michael R. Keenan, Paul A. W. van der Heide, Gustavo F. Trindade, Wilfried Vandervorst, Ian S. Gilmore

Institutions: National Physical Laboratory, IMEC, University of Catania

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402224796

FWCI: 2.209

Cites: 16

Cited by: 11

Related to: 10