Work

Numerical study of the effects of discharge parameters on capacitively coupled plasma in a magnetic field

Year: 2024

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0003692

Authors: Minghan Yan, Huanhuan Wu, Hao Wu, Yanli Peng, Shali Yang

Institutions: University of Shanghai for Science and Technology, Hubei University of Science and Technology, East China University of Technology

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G3350992746, G8759747878

OpenAlex ID: W4402229165

FWCI: 0.416

Cites: 36

Cited by: 4

Related to: 10