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Electrostatic Force Simulation Comparison of Tilted Plate Actuator and Conventional Actuator

Year: 2024

Type: article

Source: JSTS Journal of Semiconductor Technology and Science

DOI: 10.5573/jsts.2024.24.4.316

Authors: Sieun Lee, Yunyoung Jang, Jong-Pal Kim

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402250596

FWCI: 0.208

Cites:

Cited by: 2

Related to: 10