Extremely Rare Anomaly Detection Pipeline in Semiconductor Bonding Process With Digital Twin-Driven Data Augmentation Method
Year: 2024
Type: article
Authors: Mingu Jeon, In-Ho Choi, Seung-Woo Seo, Seong-Woo Kim
Institutions: Seoul National University, Samsung Electronics (South Korea)
Language: English
Subfield: Artificial Intelligence
Field: Computer Science
Domain: Physical Sciences
Open Access status: closed
Award: G5728106873
OpenAlex ID: W4402263201
