Work

SrTiO3 and (Ba,Sr)TiO3 Films Epitaxially Grown on SrRuO3 Using Atomic Layer Deposition

Year: 2024

Type: article

Source: ACS Applied Materials & Interfaces

DOI: 10.1021/acsami.4c10400

Authors: Bo-Eun Park, Jaeho Lee, Jeongil Bang, Euncheol Do, Eunsun Kim, Cheolhyun An, Seong Yong Park, Sangjun Lee, Dong-Jin Yun, Jooho Lee, Yongsung Kim, Hyung-Jun Kim

Institutions: Samsung (South Korea), Samsung Advanced Institute of Technology (South Korea), Samsung Electronics (South Korea)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402297704

FWCI: 1.041

Cites: 38

Cited by: 10

Related to: 10