Work

Study on Static Deflection Model of MEMS Capacitive Microwave Power Sensors

Year: 2024

Type: article

Source: Chinese Journal of Electronics

DOI: 10.23919/cje.2023.00.087

Authors: Ye Jin, Debo Wang

Institution: Nanjing University of Posts and Telecommunications

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, China Postdoctoral Science Foundation, Natural Science Foundation of Jiangsu Province

Awards: G2643544237, G3667503803, G4625306436

OpenAlex ID: W4402350249

FWCI: 1.041

Cites: 23

Cited by: 10

Related to: 10