Work

Rubidium and Cesium Ion-Induced Electron and Ion Signals for Scanning Ion Microscopy Applications

Year: 2024

Type: article

Abstract: Scanning ion microscopy applications of novel focused ion beam (FIB) systems based on ultracold rubidium (Rb) and cesium (Cs) atoms were investigated via ion-induced electron and ion yields. Results measured on the Rb+ and Cs+ FIB systems were compared with results from commercially available gallium (Ga+) FIB systems to verify the merits of applying Rb+ and Cs+ for imaging. The comparison shows that Rb+ and Cs+ have higher secondary electron (SE) yields on a variety of pure element targets than Ga+, which implies a higher signal-to-noise ratio can be achieved for the same dose in SE imaging using Rb+/Cs+ than Ga+. In addition, analysis of the ion-induced ion signals reveals that secondary ions dominate Cs+ induced ion signals while the Rb+/Ga+ induced signals contain more backscattered ions.

Source: Microscopy and Microanalysis

DOI: 10.1093/mam/ozae087

Authors: Yang Li, Sheng Xu, Thomas H Loeber, Edgar J D Vredenbregt

Institutions: Eindhoven University of Technology, Nanjing University, Rheinland-Pfälzische Technische Universität Kaiserslautern-Landau

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: Toegepaste en Technische Wetenschappen, NWO, Nederlandse Organisatie voor Wetenschappelijk Onderzoek

OpenAlex ID: W4402391303

FWCI: 1.002

Cites: 32

Cited by: 5

Related to: 10