The compression deformation and particles removal of PVA brushes during the post-CMP cleaning process
Year: 2024
Type: article
Authors: Fuping Chen, Yin Wang, Fan Zhou, Guangming Chai, Haiyang Jin, Zengyuan Li, Jiani Zhang, Yinkui Jiang, Zihang Wu, Jiajie Liu, Frey Zhou, Shu Yang, Xiaoyan Zhang, Hu Zhao, Xuejun Li, David Wei Zhang
Institution: Fudan University
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4402397783