Work

Low-Temperature Coefficient and Large Range Pressure Sensor Based on Single End Fixed-Support U-Beam Resonator

Year: 2024

Type: article

Source: IEEE Sensors Journal

DOI: 10.1109/jsen.2024.3454281

Authors: Jiayin Li, Xiaowen Wang, Zhiyin Cheng, Xiaohui Du, Lingyun Wang

Institutions: Xiamen University, Instrumentation Technology and Economy Institute

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Key Research and Development Program of China

Award: G710594238

OpenAlex ID: W4402401434

FWCI: 0.619

Cites: 22

Cited by: 6

Related to: 10