Work

Cryogenic Microwave Performance of Silicon Nitride and Amorphous Silicon Deposited Using Low-Temperature ICPCVD

Year: 2024

Type: article

Source: Journal of Low Temperature Physics

DOI: 10.1007/s10909-024-03216-9

Authors: Jiamin Sun, Shibo Shu, Ye Chai, Lin Zhu, Lingmei Zhang, Yongping Li, Zhouhui Liu, Zhengwei Li, Wenhua Shi, Yu Xu, Daikang Yan, Weijie Guo, Yiwen Wang, Congzhan Liu

Institutions: Shandong University, Shandong Institute of Advanced Technology, Chinese Academy of Sciences, Institute of High Energy Physics, Xiangtan University, Suzhou Institute of Nano-tech and Nano-bionics, Shenzhen International Quantum Academy, Southwest Jiaotong University

Language: English

Topic: Superconducting and THz Device Technology

Subfield: Astronomy and Astrophysics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: green

Funders: National Natural Science Foundation of China, China Postdoctoral Science Foundation, Natural Science Foundation of Shandong Province, National Key Research and Development Program of China

Awards: G1519953500, G3619815275, G6751652923, G7471508032, G8704119419

OpenAlex ID: W4402498377

FWCI: 0.565

Cites: 16

Cited by: 3

Related to: 10