Work

Design of process monitoring structures for residual stresses in MEMS membranes

Year: 2024

Type: conference-paper

Source: Seventh International Symposium on Precision Mechanical Measurements

DOI: 10.1117/12.3032721

Authors: Qingqiang Zhang, Xiaoguang Zhao

Institutions: Beijing Information Science & Technology University, Tsinghua University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402504434

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