MIM Capacitors Featuring Low EOT and Low Leakage Current Density by Nitrogen-Incorporated HfO₂/ZrO₂/HfO₂
Year: 2024
Type: article
Authors: Huan Wu, Dun-Bao Ruan, Kuei-Shu Chang-Liao
Institutions: National Tsing Hua University, Fuzhou University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4402510227