Design of sCMOS-based EUV imaging system
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3040452
Authors: Bo Sun, Hongming Zhang, Bo Lyu, Zichao Lin, Huajian Ji
Institution: Institute of Plasma Physics
Language: English
Topic: CCD and CMOS Imaging Sensors
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4402511701