Work

High groove density diffraction grating replication based on UV composite rolling technology

Year: 2024

Type: conference-paper

Source: International Conference on Optics and Image Processing (ICOIP)

DOI: 10.1117/12.3040443

Authors: Peixin Ding, Weimin Shen, Xinhua Chen, Zijiang Yang

Institution: Soochow University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402512240

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