Work

Breakdown modes of capacitively coupled plasma: II. Non-self-sustained discharges

Year: 2024

Type: article

Source: Plasma Sources Science and Technology

DOI: 10.1088/1361-6595/ad75b5

Authors: Hao Wu, Ran An, Can Jiang, Dong Zhong, Wei Jiang, Ya Zhang

Institutions: Hubei University of Science and Technology, Huazhong University of Science and Technology, Wuhan University of Technology

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Natural Science Foundation of Hubei Province, Central University Basic Research Fund of China

Awards: G3413899859, G6680748996, G7213082349

OpenAlex ID: W4402519979

FWCI: 0.308

Cites: 59

Cited by: 3

Related to: 10