Flexible Superconducting Wiring for Integration with Low-Temperature Detector and Readout Fabrication
Year: 2024
Type: article
Abstract: We present a method of creating high-density superconducting flexible wiring on flexible thin silicon substrates. The flexible wiring, called SOI flex , is created by depositing superconducting wiring on a silicon-on-insulator (SOI) wafer, selectively etching away the thicker silicon section handle layer, and bending the thinner silicon device layer. We show measurements of superconducting transition temperature and critical current for Mo, Nb, and Al on SOI flex. We discuss the expected advantages of SOI flex for low-temperature detector applications, as well as the role of stress and strain in bent silicon and niobium.
Language: English
Subfield: Astronomy and Astrophysics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: hybrid
Estimated APC paid: $3,290
Funder: National Institutes of Health
OpenAlex ID: W4402536086