Work

300-nm-thick, ultralow-loss silicon nitride photonic integrated circuits by 8-in. foundry production

Year: 2024

Type: article

Source: Applied Physics Letters

DOI: 10.1063/5.0221409

Authors: Xuguang Zhang, Yuxin Liang, Yujun Chen, Bitao Shen, Jiahui Huang, Chenghao Lao, Yichen Wu, Zhihui Li, Dapeng Liu, Haowen Shu, Weiwei Hu, Xingjun Wang, Naidi Cui, Lin Chang

Institution: Peking University

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Beijing Municipal Science and Technology Commission, Beijing Municipal Natural Science Foundation, National Key Research and Development Program of China

Awards: G1111048989, 基于先进集成光子技术的量子通信芯片研究, G5632575097, G7384633027

OpenAlex ID: W4402574291

FWCI: 1.436

Cites: 45

Cited by: 14

Related to: 10