Work

A Semi-Automatic Tool for the Extraction of RF-Plasmas Parameters by Langmuir Probe

Year: 2024

Type: conference-paper

Source: Symposium on Microelectronics Technology and Devices

DOI: 10.1109/sbmicro64348.2024.10673769

Authors: Rodrigo Cicareli, Giuseppe A. Cirino

Institution: Universidade Federal de São Carlos

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402628866

FWCI:

Cites: 4

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Related to: 10