Polymerizable Nonionic Perfluorinated Photoacid Generators for High‐Resolution Lithography
Year: 2024
Type: article
Source: Small Methods
Authors: Yue Liu, Dong Wang, Qianqian Wang, Wenbing Kang
Institution: Shandong University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G6817863652
OpenAlex ID: W4402725773