Experimental investigation on in-situ laser-assisted machining of single crystal silicon based on response surface methodology
Year: 2024
Type: article
Source: Engineering Research Express
Authors: Dong Yao, Guangfeng Shi, Siwei Meng
Institution: Changchun University of Science and Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G3868701751, G4717591663
OpenAlex ID: W4402737079