Pentaerythritol-Based Compound as a Novel Leveler for Super-Conformal Copper Electroplating
Year: 2024
Type: article
Authors: Zumin Chen, Zhen Li, Cui Liu, Anda Zhan, Jiye Luo, Daniel Shi
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G2179193533
OpenAlex ID: W4402737194