Work

A numerical analysis of the short open load calibration robustness for capacitance measurements in scanning microwave microscopy

Year: 2024

Type: article

Abstract: Numerous experimental parameters affect the accuracy of impedance measurements in scanning microwave microscopy (SMM). Investigating their effects on the measured values is particularly challenging. Here, we present the development of a fully-numerical finite element method-based simulation of the actual SMM measurements. We demonstrate the application of a self-calibration procedure for the simulated SMM measurements with a maximal deviation of ±0.8% relative to reference capacitances determined via an electrostatic finite element model. Furthermore, we demonstrate the possibility of assessing water meniscus-induced effects on the simulated SMM measurements. Typically, water meniscus impacts the calibration by a 0.4% relative deviation, in accordance with previously reported empiric data. Our findings are expected to promote access to a deeper understanding of nanoscale capacitance measurements in SMM.

Source: Measurement Science and Technology

DOI: 10.1088/1361-6501/ad7e3b