Work

High Figure of Merit 4.5 GHz Solidly Mounted Resonator Fabricated Using High-Quality Al₀.₈Sc₀.₂N Films

Year: 2024

Type: article

Source: IEEE Electron Device Letters

DOI: 10.1109/led.2024.3465567

Authors: Zekai Wang, Yao Cai, Tingting Yang, Binghui Lin, Yaxin Wang, Yuqi Ren, Yupeng Zheng, Shizhao Wang, Yan Liu, Chengliang Sun

Institution: Wuhan University

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Natural Science Foundation for Young Scientists of Shanxi Province

Awards: G2151301556, G5945287372

OpenAlex ID: W4402742609

FWCI: 0.533

Cites: 19

Cited by: 5

Related to: 10