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A Flexible Framework Based on Finite-Element Method for Capacitance Extraction of 3-Dimensional Interconnects

Year: 2024

Type: conference-paper

Source: IEEE International Conference on Semiconductor Electronics

DOI: 10.1109/icse62991.2024.10681369

Authors: Qiwen Zheng, Ye Wu, Zichang Zhang

Institutions: Xi’an Jiaotong-Liverpool University, Southern Illinois University Carbondale

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402835821

FWCI: 1.778

Cites: 13

Cited by: 1

Related to: 10