The Effects of Al2O3 Interlayer on the Ferroelectric Behavior of Hf0.5Zr0.5O2 Thin Film for E-mode Ferroelectric Charge Trap Gate GaN HEMT
Year: 2024
Type: conference-paper
Institution: National Yang Ming Chiao Tung University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4402836061
