Work

Optical field simulation of nanoscale structures on wafer surfaces based on microscopic imaging

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3046321

Authors: Na Wang, Xiaojiao Song, Weihu Zhou, Guannan Li, Lituo Liu

Institutions: Hefei University of Technology, Chinese Academy of Sciences, Institute of Microelectronics

Language: English

Topic: Advanced optical system design

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402875822

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