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Effects of Thickness and Anisotropic Strain on Polarization Switching Properties of Sub-10nm Epitaxial Hf0.5Zr0.5O2 Thin Films

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Year: 2024
Type: article
Source: Chinese Physics Letters
DOI: 10.1088/0256-307x/41/11/117701
Authors: Kuan 宽 Liu 刘, Kai 楷 Liu 刘, Xingchang 醒昌 Zhang 张, Jie 杰 Fang 方, Feng 锋 Jin 金, Wenbin 文彬 Wu 吴, Chao 超 Ma 马, Lingfei 凌飞 Wang 王
Institutions: University of Science and Technology of China, Hunan University, Collaborative Innovation Center of Advanced Microstructures, Nanjing University
Language: English

Topic: Ferroelectric and Negative Capacitance Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: closed
OpenAlex ID: W4402875824
FWCI: 0.513
Cites: 57
Cited by: 5
Related to: 10
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