Work

MEMS Pitch Gyroscope Based on (250-nm)² Gauges Achieving 0.12 °/hr Over 1000 dps Full-Scale

Year: 2024

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2024.3460401

Authors: Andrea Buffoli, Marco Gadola, Philippe Robert, Giacomo Langfelder

Institutions: Politecnico di Milano, Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Laboratoire d'Électronique des Technologies de l'Information

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402893698

FWCI: 0.312

Cites: 20

Cited by: 3

Related to: 10