Work

Design of laser direct writing system for semiconductor photoelectrochemical etching

Year: 2024

Type: conference-abstract

Source: International Conference on Mechanical Engineering, Materials and Automation Technology (MMEAT)

DOI: 10.1117/12.3046709

Authors: Wen Yuan, Yao Liu, Jiawei Cheng, Lianhuan Han, Chuan Liu, Jian-Jia Su, Dongping Zhan

Institution: Xiamen University

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402912247

Cites:

Cited by:

Related to: 10