Work

Kanban Feedback Control for Wafer Delay Regulation of Cluster Tools

Year: 2024

Type: article

Source: IEEE Transactions on Automation Science and Engineering

DOI: 10.1109/tase.2024.3455253

Authors: Dong-Hyun Roh, Tae-Eog Lee, Claude Martinez

Institutions: Samsung (South Korea), Samsung Electronics (South Korea), Korea Advanced Institute of Science and Technology, École Centrale de Nantes, Centre National de la Recherche Scientifique, Laboratoire des Sciences du Numérique de Nantes

Language: English

Topic: Petri Nets in System Modeling

Subfield: Computational Theory and Mathematics

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402915302

FWCI: 2.407

Cites: 66

Cited by: 12

Related to: 10