Work

Four-Terminal Polycrystalline-Silicon Vertical Thin-Film Transistors on Glass Substrates for pH Sensor Applications

Year: 2024

Type: conference-paper

Source: ECS Transactions

DOI: 10.1149/11403.0049ecst

Authors: Kosei Suzuki, Masahide Nitta, Tetsuo Tabei, Akito Hara

Language: English

Topic: Analytical Chemistry and Sensors

Subfield: Bioengineering

Field: Chemical Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Japan Society for the Promotion of Science

Award: A self-aligned 3D integration technology for poly-group IV TFTs for LSIs on glass substrates

OpenAlex ID: W4402931021

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