Work

Developing the Metrology for Atomic Level Spatial Distribution and Local Chemistry Analysis of in-Situ Dopants By Atom Probe Tomography

Year: 2024

Type: conference-paper

Source: ECS Transactions

DOI: 10.1149/11402.0297ecst

Authors: Jhao-Rong Lin, Richard J. H. Morris, Jeroen E. Scheerder, Andriy Yakovitch Hikavyy, Clement Porret, André Vantomme, Claudia Fleischmann

Language: English

Topic: Advanced Materials Characterization Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402931223

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