Work

Study of Chemical-Physical Cleaning Technologies for Better Particle Removal Trapped on the Crystal Defects of 4H-SiC

Year: 2024

Type: conference-paper

Source: ECS Transactions

DOI: 10.1149/11401.0093ecst

Authors: Geu-Rim Ha, Yoon-Ji Ra, Yeonje Gye, Jingoo Park, Tae-Gon Kim, Juyeol Lee, Jooyoung Yang, Tae-Uk Kim

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402931320

FWCI: 1.612

Cites:

Cited by: 2

Related to: 10