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Direct Determination of Metallic Contamination on and in Wafers Using Laser Ablation Inductively Coupled Plasma Mass Spectrometry

Year: 2024

Type: conference-paper

Source: ECS Transactions

DOI: 10.1149/11401.0035ecst

Authors: Katsu Kawabata, Tatsu Ichinose, Koshi Suzuki

Language: English

Topic: Laser-induced spectroscopy and plasma

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402931337

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